منابع مشابه
Single-mask Thermal Displacement Sensor in Mems
In this work we describe a one degree-of-freedom microelectromechanical thermal displacement sensor integrated with an actuated stage. The system was fabricated in the device layer of a silicon-on-insulator wafer using a single-mask process. The sensor is based on the temperature dependent electrical resistivity of silicon and the heat transfer by conduction through a thin layer of air. On a me...
متن کاملA single-mask thermal displacement sensor in MEMS
Position sensing in MEMS is often based on the principle of varying capacitance [1]. Alternative position sensing principles include using integrated optical waveguides [2] or varying thermal conductance [3]. Lantz et al demonstrated a thermal displacement sensor achieving nanometre resolution on a 100μm range. However a multi-mask production process and manual assembly were needed to fabricate...
متن کاملNew Design of Mems piezoresistive pressure sensor
The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...
متن کاملMems Based Xy Stage with Large Displacement
This paper presents a micro XY stage that employs electrostatic comb-drive actuators and achieves a bi-directional displacement range greater than 225 μm per motion axis. The proposed XY stage design comprises four rigid stages (ground, motion stage, and two intermediate stages) interconnected via flexure modules. The motion stage, which has two translational degrees of freedom, is connected to...
متن کاملDesign of Novel High Sensitive MEMS Capacitive Fingerprint Sensor
In this paper a new design of MEMS capacitive fingerprint sensors is presented. The capacitive sensor is made of two parallel plates with air gap. In these sensors, the capacitance changes is very important factor. It is caused by deformation of the upper electrode of sensor. In this study with making slots in upper electrode, using T-shaped protrusion on diaphragm in order to concentrate the f...
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2010
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2010.09.193